Laura Pruette

Evaluation of C[sub 4]F[sub 8]O as an Alternative Plasma-Enhanced Chemical Vapor Deposition Chamber Clean Chemistry

Laura Pruette, Simon Karecki, R. Reif et al. · Journal of The Electrochemical Society · 2000 · 33 citations

Engineering, Chemical Engineering, Chemistry +14

Lithographic Properties of Poly(<i>tert</i>-butyl methacrylate)-Based Block and Random Copolymer Resists Designed for 193 nm Wavelength Exposure Tools

Allen H. Gabor, Laura Pruette, Christopher K. Ober · Chemistry of Materials · 1996 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +14

Use of Novel Hydrofluorocarbon and Iodofluorocarbon Chemistries for a High Aspect Ratio Via Etch in a High Density Plasma Etch Tool

Simon Karecki, Laura Pruette, R. Reif et al. · Journal of The Electrochemical Society · 1998 · 27 citations

Engineering, Chemical Engineering, Materials Engineering +13

Evaluation of trifluoroacetic anhydride as an alternative plasma enhanced chemical vapor deposition chamber clean chemistry

Laura Pruette, Simon Karecki, R. Reif et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 27 citations

Natural Sciences, Chemical Engineering, Materials Science +16

Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool

Simon Karecki, Ritwik Chatterjee, Laura Pruette et al. · Journal of The Electrochemical Society · 2001 · 16 citations

Natural Sciences, Chemistry, Materials Engineering +13