Catherine B. Labelle

Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

N. Loubet, Terence B. Hook, P. Montanini et al. · 2017 · 939 citations

Engineering, Nanocomputing, Semiconductor Device +17

A 7nm FinFET technology featuring EUV patterning and dual strained high mobility channels

Ruijie Xie, P. Montanini, Kerem Akarvardar et al. · 2016 · 139 citations

Engineering, Electron-beam Lithography, Finfet Technology +18

Growth of fluorocarbon polymer thin films with high CF2 fractions and low dangling bond concentrations by thermal chemical vapor deposition

Scott J. Limb, Catherine B. Labelle, Karen K. Gleason et al. · Applied Physics Letters · 1996 · 129 citations

Engineering, Bond Concentrations, High Cf2 Fractions +16

Tungsten and cobalt metallization: A material study for MOL local interconnects

V. Kamineni, M. Raymond, S. Siddiqui et al. · 2016 · 63 citations

Mol Local Interconnects, Engineering, Cvd W-based Metallization +21

Pulsed plasma-enhanced chemical vapor deposition from CH2F2, C2H2F4, and CHClF2

Catherine B. Labelle, Karen K. Gleason · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 55 citations

Materials Science, Chemical Engineering, Dielectric Constant +15