Dmytro Chumakov

Stress-induced phenomena in nanosized copper interconnect structures studied by x-ray and electron microscopy

Ehrenfried Zschech, R. Huebner, Dmytro Chumakov et al. · Journal of Applied Physics · 2009 · 41 citations · Full text

Engineering, Severe Plastic Deformation, Defect Tolerance +19

Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy

Péter Hermann, M. Hecker, Dmytro Chumakov et al. · Ultramicroscopy · 2011 · 36 citations

Materials Science, Nanoscale Science, Engineering +12

Depth dependence of ultraviolet curing of organosilicate low-k thin films

Taek‐Soo Kim, Naoto Tsuji, Nathan Kemeling et al. · Journal of Applied Physics · 2008 · 26 citations · Full text

Engineering, Glass Material, Vacuum Device +17

Tuning depth profiles of organosilicate films with ultraviolet curing

Taek‐Soo Kim, Naoto Tsuji, Kiyohiro Matsushita et al. · Journal of Applied Physics · 2008 · 22 citations

Materials Science, Optical Materials, Broadband Uv Irradiation +13

Novel Carbon-Cage-Based Ultralow-$k$ Materials: Modeling and First Experiments

K. Zagorodniy, Dmytro Chumakov, Christine Täschner et al. · IEEE Transactions on Semiconductor Manufacturing · 2008 · 10 citations

Nanosheet, Engineering, Chemistry +18