Concepedia

Nathan Kemeling

NK

3

Publications

107

Citations

3

H-Index

2007

Active since

Affiliations

ASM International (Belgium)(Current)

Nathan Kemeling is an author at ASM International (Belgium) specializing in applied physics, materials science, and engineering.

Top concepts

Publications per year

2007–2008

3

Publications

3

Characterization and optimization of porogen-based PECVD deposited extreme low-k materials as a function of UV-cure time

Patrick Verdonck, David De Roest, Shinya Kaneko et al. · Surface and Coatings Technology · 2007 · 51 citations

, , +7

A robust k∼2.3 SiCOH low-k film formed by porogen removal with UV-cure

Nathan Kemeling, Kiyohiro Matsushita, Naoto Tsuji et al. · Microelectronic Engineering · 2007 · 30 citations

, , +7

Depth dependence of ultraviolet curing of organosilicate low-k thin films

Taek‐Soo Kim, Naoto Tsuji, Nathan Kemeling et al. · Journal of Applied Physics · 2008 · 26 citations · Full text

, , +17

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