Concepedia

Kiyohiro Matsushita

KM

Statistics

Publications

4

Citations

129

H-Index

4

Active since

2007

Affiliations

ASM International (Belgium)(Current)

Stanford University

Kiyohiro Matsushita is an author at ASM International (Belgium) specializing in materials engineering, natural sciences, and materials science.

Publications per year

2007–2008

4

Publications

4

Characterization and optimization of porogen-based PECVD deposited extreme low-k materials as a function of UV-cure time

Patrick Verdonck, David De Roest, Shinya Kaneko et al. · Surface and Coatings Technology · 2007 · 51 citations

, , +10

A robust k∼2.3 SiCOH low-k film formed by porogen removal with UV-cure

Nathan Kemeling, Kiyohiro Matsushita, Naoto Tsuji et al. · Microelectronic Engineering · 2007 · 30 citations

, , +4

Depth dependence of ultraviolet curing of organosilicate low-k thin films

Taek‐Soo Kim, Naoto Tsuji, Nathan Kemeling et al. · Journal of Applied Physics · 2008 · 26 citations · Full text

, , +17

Tuning depth profiles of organosilicate films with ultraviolet curing

Taek‐Soo Kim, Naoto Tsuji, Kiyohiro Matsushita et al. · Journal of Applied Physics · 2008 · 22 citations

, , +17

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