Concepedia

C. Peyne

CP

2

Publications

29

Citations

2

H-Index

1999

Active since

Affiliations

STMicroelectronics (France)(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

C. Peyne is an author at STMicroelectronics (France) specializing in microelectronics, engineering, and electrical engineering.

Top concepts

EngineeringMicroelectronicsElectrical EngineeringApplied PhysicsNanoelectronicsElectrochemistryMicrofabricationWater PurificationChemical EngineeringElectronic Packaging

Publications per year

1999–2001

2

Publications

2

Improved post etch cleaning for low-k and copper integration for 0.18μm technology

D. Louis, C. Peyne, E. Lajoinie et al. · Microelectronic Engineering · 1999 · 17 citations

Electrical Engineering, Chemical Engineering, Engineering +8

Cleaning status on low-k dielectric in advanced VLSI interconnect:

D. Louis, Alessio Beverina, C. Arvet et al. · Microelectronic Engineering · 2001 · 12 citations

Electrical Engineering, Engineering, Advanced Packaging (Semiconductors) +8

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