K.‐E. Ehwald

Novel collector design for high-speed SiGe:C HBTs

B. Heinemann, H. Rücker, R. Barth et al. · 2003 · 107 citations

Electrical Engineering, Engineering, Vlsi Design +8

BEOL embedded RF-MEMS switch for mm-wave applications

Mehmet Kaynak, K.‐E. Ehwald, J. Drews et al. · 2009 · 47 citations

Electrical Engineering, Engineering, Radio Frequency +15

Corrosion-resistant metal layers from a CMOS process for bioelectronic applications

M. Birkholz, K.‐E. Ehwald, D. Wolansky et al. · Surface and Coatings Technology · 2009 · 43 citations

Materials Science, Electrical Engineering, Corrosion Protection +7

Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices

M. Birkholz, K.‐E. Ehwald, P. Kulse et al. · Advanced Functional Materials · 2011 · 42 citations · Full text

Engineering, Microelectromechanical Systems, Biomedical Engineering +21

A flexible, low-cost, high performance SiGe:C BiCMOS process with a one-mask HBT module

D. Knoll, K.‐E. Ehwald, B. Heinemann et al. · 2003 · 41 citations

Electrical Engineering, Hbt Devices, Engineering +12