K.‐E. Ehwald

Statistics

Publications

Citations

546

H-Index

Active since

1995

Affiliations

Leibniz Institute for High Performance Microelectronics(Current)

Institut für Solartechnologien (Germany)

Sabancı Üniversitesi

K.‐E. Ehwald is an author at Leibniz Institute for High Performance Microelectronics specializing in engineering, microelectronics, and semiconductor devices.

Publications per year

1995–2013

Publications

Novel collector design for high-speed SiGe:C HBTs

B. Heinemann, H. Rücker, R. Barth et al. · 2003 · 107 citations

Engineering, Electrical Engineering, Electronic Materials +16

BEOL embedded RF-MEMS switch for mm-wave applications

Mehmet Kaynak, K.‐E. Ehwald, J. Drews et al. · 2009 · 47 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices

M. Birkholz, K.‐E. Ehwald, P. Kulse et al. · Advanced Functional Materials · 2011 · 44 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Corrosion-resistant metal layers from a CMOS process for bioelectronic applications

M. Birkholz, K.‐E. Ehwald, D. Wolansky et al. · Surface and Coatings Technology · 2009 · 44 citations

Engineering, Electrical Engineering, Materials Science +16

A flexible, low-cost, high performance SiGe:C BiCMOS process with a one-mask HBT module

D. Knoll, K.‐E. Ehwald, B. Heinemann et al. · 2003 · 42 citations

Engineering, Electrical Engineering, Electronic Materials +16

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