3
Publications
54
Citations
3
H-Index
1981
Active since
Affiliations
J. Matthäi is an author at Deggendorf Institute of Technology specializing in integrated circuits, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsIntegrated CircuitsMicrostructureSemiconductorsSolidificationOptoelectronics
Publications per year
1981–1986
3
3
Flash lamp annealing of arsenic implanted silicon
R. Klabes, J. Matthäi, M. Voelskow et al. · physica status solidi (a) · 1981 · 31 citations
Engineering, Optoelectronic Devices, Integrated Circuits +17
Structure of Annealed Polycrystalline Silicon Films. I. Recrystallization
F. L. Edelman, J. Heydenreich, D. Hoehl et al. · physica status solidi (a) · 1986 · 10 citations
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