Concepedia

J. Matthäi

JM

Statistics

Publications

3

Citations

54

H-Index

3

Active since

1981

Affiliations

Deggendorf Institute of Technology(Current)

Institute of Semiconductor Physics

J. Matthäi is an author at Deggendorf Institute of Technology specializing in integrated circuits, applied physics, and engineering.

Top concepts

Publications per year

1981–1986

3

Publications

3

Flash lamp annealing of arsenic implanted silicon

R. Klabes, J. Matthäi, M. Voelskow et al. · physica status solidi (a) · 1981 · 31 citations

, , +17

Thick monocrystalline silicon on oxidized silicon wafers produced by a zone melting process using a scanning halogen lamp

Bernd Tillack, P. Möck, R. Banisch et al. · physica status solidi (a) · 1986 · 13 citations

, , +19

Structure of Annealed Polycrystalline Silicon Films. I. Recrystallization

F. L. Edelman, J. Heydenreich, D. Hoehl et al. · physica status solidi (a) · 1986 · 10 citations

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