Concepedia

R. Klabes

RK

Statistics

Publications

8

Citations

176

H-Index

8

Active since

1977

Affiliations

Deggendorf Institute of Technology(Current)

Technische Universität Dresden

Helmholtz-Zentrum Dresden-Rossendorf

R. Klabes is an author at Deggendorf Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsSurface ScienceThin FilmsMicrostructureMicrofabricationCrystalline DefectsIntegrated Circuits

Publications per year

1977–1992

8

Publications

8

Laser annealing of arsenic implanted silicon

J. Krynicki, J. Suski, S. Ugniewski et al. · Physics Letters A · 1977 · 51 citations

Materials Science, Arsenic Implanted Silicon, Engineering +4

Flash lamp annealing of arsenic implanted silicon

R. Klabes, J. Matthäi, M. Voelskow et al. · physica status solidi (a) · 1981 · 31 citations

Engineering, Optoelectronic Devices, Integrated Circuits +17

Silver photodiffusion in amorphous Ge Se100−

G. Kluge, Andreas Thomas, R. Klabes et al. · Journal of Non-Crystalline Solids · 1990 · 21 citations

High speed scanning electron beam annealing of ion-implanted silicon layers

S. Schiller, S. Panzer, R. Klabes · Thin Solid Films · 1980 · 17 citations

Electrical Engineering, Ion Implantation, Engineering +5

Recoil implantation from thin surface films on silicon

R. Grötzschel, R. Klabes, A. Schmidt · Radiation Effects · 1978 · 17 citations

Materials Science, Incidence Energy, Ion Implantation +15

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