Katie Lutker-Lee

Outlook for high-NA EUV patterning: a holistic patterning approach to address upcoming challenges

Angélique Raley, Lior Huli, Steven Grzeskowiak et al. · 2022 · 13 citations

Engineering, Materials Engineering, Materials Science +12

Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features

Ashim Dutta, Jennifer Church, Joe Lee et al. · 2020 · 12 citations

Engineering, Materials Engineering, Materials Science +17

Low-<i>k</i> dielectric etch challenges at the 7 nm logic node and beyond: Continuous-wave versus quasiatomic layer plasma etching performance review

Katie Lutker-Lee, Yen-Tien Lu, Qiaowei Lou et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 10 citations

Engineering, Electrical Engineering, Materials Science +16

Plasma-based area selective deposition for extreme ultraviolet resist defectivity reduction and process window improvement

Katie Lutker-Lee, Jennifer Church, Eric R. Miller et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2022 · 10 citations

Natural Sciences, Electrical Engineering, Materials Science +17