Concepedia

Qiaowei Lou

QL

Statistics

Publications

5

Citations

112

H-Index

5

Active since

2014

Affiliations

University of Houston(Current)

Qiaowei Lou is an author at University of Houston specializing in natural sciences, materials science, and materials engineering.

Publications per year

2014–2020

5

Publications

5

Atomic layer etching of silicon dioxide using alternating C<sub>4</sub>F<sub>8</sub>and energetic Ar<sup>+</sup>plasma beams

Sanbir S. Kaler, Qiaowei Lou, Vincent M. Donnelly et al. · Journal of Physics D Applied Physics · 2017 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +17

Silicon nitride and silicon etching by CH3F/O2 and CH3F/CO2 plasma beams

Sanbir S. Kaler, Qiaowei Lou, Vincent M. Donnelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Optical emission spectroscopic studies and comparisons of CH3F/CO2 and CH3F/O2 inductively coupled plasmas

Qiaowei Lou, Sanbir S. Kaler, Vincent M. Donnelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 14 citations · Full text

Natural Sciences, Chemistry, Physics +14

Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features

Ashim Dutta, Jennifer Church, Joe Lee et al. · 2020 · 12 citations

Engineering, Materials Engineering, Materials Science +17

Low-<i>k</i> dielectric etch challenges at the 7 nm logic node and beyond: Continuous-wave versus quasiatomic layer plasma etching performance review

Katie Lutker-Lee, Yen-Tien Lu, Qiaowei Lou et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 10 citations

Engineering, Electrical Engineering, Materials Science +16

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