Concepedia

Sanbir S. Kaler

SS

Statistics

Publications

3

Citations

90

H-Index

3

Active since

2014

Affiliations

University of Houston(Current)

Sanbir S. Kaler is an author at University of Houston specializing in natural sciences, materials engineering, and plasma etching.

Publications per year

2014–2017

3

Publications

3

Atomic layer etching of silicon dioxide using alternating C<sub>4</sub>F<sub>8</sub>and energetic Ar<sup>+</sup>plasma beams

Sanbir S. Kaler, Qiaowei Lou, Vincent M. Donnelly et al. · Journal of Physics D Applied Physics · 2017 · 53 citations

, , +17

Silicon nitride and silicon etching by CH3F/O2 and CH3F/CO2 plasma beams

Sanbir S. Kaler, Qiaowei Lou, Vincent M. Donnelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 23 citations

, , +17

Optical emission spectroscopic studies and comparisons of CH3F/CO2 and CH3F/O2 inductively coupled plasmas

Qiaowei Lou, Sanbir S. Kaler, Vincent M. Donnelly et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 14 citations · Full text

, , +14

1–3 of 3