10
Publications
429
Citations
10
H-Index
2014
Active since
Eric R. Miller is an author at IBM (United States) specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringApplied PhysicsNanoelectronicsMaterial ScienceMicroelectronicsElectrical EngineeringMicrofabricationChemistryMaterials EngineeringPolymers
Publications per year
2014–2024
10
10
Future of plasma etching for microelectronics: Challenges and opportunities
G. S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024 · 103 citations · Full text
Materials Science, Electrical Engineering, Digital Twins +14
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