G. Chamiot-Maitral

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Active since

2009

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Arkema (France)

Centre National de la Recherche Scientifique

CEA Grenoble

G. Chamiot-Maitral is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in microfabrication, materials engineering, and engineering.

Publications per year

2009–2015

Publications

300mm pilot line DSA contact hole process stability

Maxime Argoud, I. Servin, A. Gharbi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Isabelle Servin, Raluca Tiron, Ahmed Gharbi et al. · Japanese Journal of Applied Physics · 2014 · 23 citations

Engineering, Materials Engineering, Materials Science +17

Template affinity role in CH shrink by DSA planarization

Raluca Tiron, A. Gharbi, Patricia Pimenta‐Barros et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 18 citations

Engineering, Materials Engineering, Materials Science +15

Back-end-of-line integration approaches for resistive memories

V. Jousseaume, Julien Buckley, Y. Bernard et al. · 2009 · 10 citations

Engineering, Electrical Engineering, Materials Science +17

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