Concepedia

Thorsten Last

TL

9

Publications

290

Citations

9

H-Index

2004

Active since

Affiliations

ASML (Netherlands)(Current)

Thorsten Last is an author at ASML (Netherlands) specializing in engineering, ophthalmology, and computational imaging.

Top concepts

EngineeringOphthalmologyMicroscopyApplied PhysicsComputational ImagingOptical PropertiesPhysicsMedicineRadiologyOptoelectronics

Publications per year

2004–2021

9

Publications

9

Enabling sub-10nm node lithography: presenting the NXE:3400B EUV scanner

Mark van de Kerkhof, Hans Jasper, Leon Levasier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 81 citations

Sub-10nm Node Lithography, Engineering, Electron-beam Lithography +16

Multi-component based cross correlation beat detection in electrocardiogram analysis

Thorsten Last, Chris Nugent, F. J. Owens · BioMedical Engineering OnLine · 2004 · 52 citations · Full text

Electrophysiological Evaluation, Engineering, Electrocardiogram Analysis +6

Mitigation of mask three-dimensional induced phase effects by absorber optimization in ArF<sub>i</sub>and extreme ultraviolet lithography

Jo Finders, Laurens de Winter, Thorsten Last · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 41 citations

Optical Materials, Engineering, Electron-beam Lithography +21

Contrast optimization for 0.33NA EUV lithography

Jo Finders, Sander F. Wuister, Thorsten Last et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 31 citations

Engineering, Electron-beam Lithography, Microscopy +17

Accelerating quantum computer developments

Garrelt Alberts, M. A. Rol, Thorsten Last et al. · EPJ Quantum Technology · 2021 · 23 citations · Full text

Mature Supply Chain, Quantum Software, Quantum System Software +17

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