Concepedia

Manabu Hamagaki

MH

16

Publications

398

Citations

12

H-Index

1980

Active since

Affiliations

Hosei University

Institute of Semiconductors

Institute of Physical and Organic Chemistry

Manabu Hamagaki is an author at RIKEN specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPhysicsMicroelectronicsPlasma PhysicsOptoelectronicsAtomic PhysicsPlasma ScienceChemistry

Publications per year

1980–2002

16

Publications

16

Digital etching of GaAs: New approach of dry etching to atomic ordered processing

T. Meguro, Manabu Hamagaki, S. Modaressi et al. · Applied Physics Letters · 1990 · 90 citations

Engineering, Electron-beam Lithography, Digital Etching +17

New high current low energy ion source

T. Hara, Manabu Hamagaki, A. I. Sanda et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 66 citations

Low-power Electronics, Electrical Engineering, Energy Harvesting +13

Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System

Takashi Meguro, Masashi Ishii, Hirokazu Kodama et al. · Japanese Journal of Applied Physics · 1990 · 30 citations

Electrical Engineering, Engineering, Electron-beam-excited Plasma System +12

New Etching System with a Large Diameter Using Electron Beam Excited Plasma

Makoto Ryoji, Tamio Hara, Katsu Ohnishi et al. · Japanese Journal of Applied Physics · 1992 · 27 citations

Materials Science, New Etching System, Electrical Engineering +13

Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam Excited Plasma (EBEP) System

Jin-Zhong Yu, Norio Masui, Yoshihiko Yuba et al. · Japanese Journal of Applied Physics · 1989 · 25 citations

Semiconductors, Gaas Etched, Electrical Engineering +14

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