T. Hara

Digital etching of GaAs: New approach of dry etching to atomic ordered processing

T. Meguro, Manabu Hamagaki, S. Modaressi et al. · Applied Physics Letters · 1990 · 90 citations

Engineering, Electron-beam Lithography, Digital Etching +17

New high current low energy ion source

T. Hara, Manabu Hamagaki, A. I. Sanda et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 66 citations

Low-power Electronics, Electrical Engineering, Energy Harvesting +13

A 10‐in. surface‐conduction electron‐emitter display

Eiichi Yamaguchi, K Sakai, Ichirou Nomura et al. · Journal of the Society for Information Display · 1997 · 63 citations

Engineering, Electron-beam Lithography, Electronic Devices +16

Development of Atmospheric Plasma Jet With Long Flame

Y. Takemura, Yūsuke Kubota, Naohiro Yamaguchi et al. · IEEE Transactions on Plasma Science · 2009 · 27 citations

Engineering, Atmospheric Plasma Jet, Aerospace Engineering +11

High Degree of Dissociation of Nitrogen Molecules in Large-Volume Electron-Beam-Excited Plasma

Kazunari Taniguchi, Masaya Sugimoto, Shingo Masuko Shingo Masuko et al. · Japanese Journal of Applied Physics · 2000 · 13 citations

Nitrogen Molecules, Engineering, Large-volume Electron-beam-excited Plasma +17