Concepedia

Hirokazu Kodama

HK

2

Publications

48

Citations

2

H-Index

1990

Active since

Affiliations

Hosei University(Current)

RIKEN

Hirokazu Kodama is an author at Hosei University specializing in microfabrication, electrical engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsOptoelectronicsMicroelectronicsMicrofabricationElectrical EngineeringSurface Science

Publications per year

1990–1992

2

Publications

2

Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System

Takashi Meguro, Masashi Ishii, Hirokazu Kodama et al. · Japanese Journal of Applied Physics · 1990 · 30 citations

Electrical Engineering, Engineering, Electron-beam-excited Plasma System +12

Study of Surface Processes in the Digital Etching of GaAs

Masashi Ishii, Takashi Meguro, Hirokazu Kodama et al. · Japanese Journal of Applied Physics · 1992 · 18 citations

Electrical Engineering, Ion Implantation, Engineering +15

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