Alvin H. Leung

<title>System integration and performance of the EUV engineering test stand</title>

Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, William C. Replogle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 40 citations

Natural Sciences, Physics, Digital Imaging +7

First lithographic results from the extreme ultraviolet Engineering Test Stand

Henry N. Chapman, Avijit K. Ray-Chaudhuri, Daniel A. Tichenor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 37 citations

Engineering, Electrical Engineering, Optics +10

Verification studies of thermophoretic protection for extreme ultraviolet masks

Daniel E. Dedrick, Eric W. Beyer, Daniel J. Rader et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 27 citations

Engineering, Materials Engineering, Materials Science +14

<title>First environmental data from the EUV engineering test stand</title>

Leonard E. Klebanoff, Michael E. Malinowski, Philip A. Grunow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 23 citations

Engineering, Environmental Engineering, Materials Engineering +10

<title>Initial results from the EUV engineering test stand</title>

Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations

Natural Sciences, Physics, Digital Imaging +8