Eric W. Beyer

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Active since

2002

Affiliations

Sandia National Laboratories California(Current)

Eric W. Beyer is an author at Sandia National Laboratories California specializing in temperature gradient effects, materials engineering, and engineering.

Publications per year

2002–2005

Publications

Verification studies of thermophoretic protection for extreme ultraviolet masks

Daniel E. Dedrick, Eric W. Beyer, Daniel J. Rader et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 27 citations

Engineering, Materials Engineering, Materials Science +14

Verification studies of thermophoretic protection for EUV masks

Daniel J. Rader, Daniel E. Dedrick, Eric W. Beyer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 13 citations

Engineering, Materials Engineering, Materials Science +10

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