O.S. Nakagawa

Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing

B.E. Stine, Dennis O. Ouma, R. Divecha et al. · IEEE Transactions on Semiconductor Manufacturing · 1998 · 138 citations

Engineering, Pattern-dependent Effects, Mechanical Engineering +18

An efficient inductance modeling for on-chip interconnects

Lei He, Norman Chang, Shide Lin et al. · 2003 · 99 citations

Rlc Models, Electrical Engineering, Efficient Inductance +14

GaAs Interfaces with Octadecyl Thiol Self-Assembled Monolayer: Structural and Electrical Properties

O.S. Nakagawa, S. Ashok, Chin-Shown Sheen et al. · Japanese Journal of Applied Physics · 1991 · 87 citations

Materials Science, Semiconductors, Electrical Engineering +15

Interconnect scaling: signal integrity and performance in future high-speed CMOS designs

Dennis Sylvester, Chenming Hu, O.S. Nakagawa et al. · 2002 · 54 citations

Scaled Ulsi Interconnects, Electrical Engineering, Interconnect Scaling +13

A scaling scheme for interconnect in deep-submicron processes

K. Rahmat, O.S. Nakagawa, Soo‐Young Oh et al. · 2002 · 53 citations

Scaling Scheme, Engineering, Global Lines +15