Statistics
Publications
4
Citations
97
H-Index
4
Active since
2011
Affiliations
Pradeep Vukkadala is an author at KLA (United States) specializing in engineering, semiconductor devices, and device characterization.
Publications per year
2011–2014
4
4
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
Timothy A. Brunner, Vinayan C. Menon, Cheuk Wun Wong et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 47 citations · Full text
Engineering, Manufacturing Engineering, Manufacturing Processes +13
Characterization and mitigation of overlay error on silicon wafers with nonuniform stress
Timothy A. Brunner, Vinayan C. Menon, Cheuk Wun Wong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 20 citations
Engineering, Materials Science, Computer-integrated Manufacturing +15
Determining local residual stresses from high resolution wafer geometry measurements
Jie Gong, Pradeep Vukkadala, Jaydeep K. Sinha et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 11 citations
Engineering, Manufacturing Engineering, Materials Science +17
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