Bernard T. Beauchemin

Thin-Layer Chromatographic-Diffuse Reflectance Infrared Fourier Transform Spectroscopic Analysis

Phyllis R. Brown, Bernard T. Beauchemin · Journal of Liquid Chromatography · 1988 · 25 citations

Situ Ftir Analysis, Spectroscopic Method, Engineering +13

Studies of the molecular mechanism of dissolution inhibition of positive photoresists based on novolac-DNQ

Kenji Honda, Bernard T. Beauchemin, Rodney J. Hurditch et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 24 citations

Photobiology, Chemistry, Secondary Dynamic +17

Quantitative analysis of diazonaphthoquinones by thin-layer chromatographic/diffuse reflectance infrared Fourier-transform spectrometry

Bernard T. Beauchemin, Phyllis R. Brown · Analytical Chemistry · 1989 · 19 citations

Engineering, Altmetric Attention Score, Phyllis R. Browncite +16

Quantitative description of dissolution and dissolution inhibition in novolak and other phenolic resins

Tung‐Feng Yeh, Hsiao-Yih Shih, Arnost Reiser et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 12 citations

Engineering, Chemical Analysis, Dissolution Rates +16

Mechanism studies of scanning electron microscope measurement effects on 193-nm photoresists and the development of improved line-width measurement methods

T. R. Sarrubi, Matthew F. Ross, Mark Neisser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations

Mechanism Studies, Engineering, Electron-beam Lithography +25