Concepedia

Matthew F. Ross

MF

2

Publications

39

Citations

2

H-Index

2001

Active since

Affiliations

Cypress Semiconductor Corporation (Japan)(Current)

Matthew F. Ross is an author at Cypress Semiconductor Corporation (Japan) specializing in electrical engineering, physics, and materials engineering.

Top concepts

PhysicsEngineeringApplied PhysicsInstrumentationMicroelectronicsElectrical InsulationMaterials EngineeringElectrical EngineeringMicroscopyMeasurement

Publications per year

2001–2002

2

Publications

2

193-nm CD shrinkage under SEM: modeling the mechanism

Andrew Habermas, Dongsung Hong, Matthew F. Ross et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 28 citations

Engineering, Electron-beam Lithography, Defect Tolerance +16

Mechanism studies of scanning electron microscope measurement effects on 193-nm photoresists and the development of improved line-width measurement methods

T. R. Sarrubi, Matthew F. Ross, Mark Neisser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations

Mechanism Studies, Engineering, Electron-beam Lithography +25

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