Concepedia

T. R. Sarrubi

TR

1

Publications

11

Citations

1

H-Index

2001

Active since

Affiliations

KLA (United States)(Current)

T. R. Sarrubi is an author at KLA (United States) specializing in electrical engineering, materials engineering, and electrical insulation.

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Publications per year

2001–2001

1

Publications

1

Mechanism studies of scanning electron microscope measurement effects on 193-nm photoresists and the development of improved line-width measurement methods

T. R. Sarrubi, Matthew F. Ross, Mark Neisser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations

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