Concepedia

Charlie Chen

CC

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Publications

3

Citations

43

H-Index

3

Active since

2006

Affiliations

KLA (Israel)(Current)

Charlie Chen is an author at KLA (Israel) specializing in computer engineering, engineering, and instrumentation.

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Publications per year

2006–2014

3

Publications

3

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 21 citations

, , +21

A Circular Hough Transform Hardware for Industrial Circle Detection Applications

Jau Jen, Mon Shie, Charlie Chen · 2006 · 12 citations

, , +14

Techniques for improving overlay accuracy by using device correlated metrology targets as reference

Wei Jhe Tzai, Simon C. C. Hsu, Howard Chen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations · Full text

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