W. M. van de Wijgert

Influence of Deposition Temperature, Gas Pressure, Gas Phase Composition, and RF Frequency on Composition and Mechanical Stress of Plasma Silicon Nitride Layers

W. A. P. Claassen, W. G. J. N. Valkenburg, M. F. C. Willemsen et al. · Journal of The Electrochemical Society · 1985 · 190 citations

Engineering, Mechanical Engineering, Plasma Physics +19

The effect of doping on the formation of swirl defects in dislocation-free czochralski-grown silicon crystals

Anton Köck, W. M. van de Wijgert · Journal of Crystal Growth · 1980 · 99 citations

Materials Science, Materials Engineering, Engineering +8

The influence of thermal point defects on the precipitation of oxygen in dislocation-free silicon crystals

Anton Köck, W. M. van de Wijgert · Applied Physics Letters · 1981 · 52 citations

Engineering, X-ray Transmission Topography, Crystal Growth Technology +16

The effect of doping on microdefect formation in as-grown dislocation-free Czochralski silicon crystals

Anton Köck, W. T. Stacy, W. M. van de Wijgert · Applied Physics Letters · 1979 · 48 citations

Materials Engineering, Materials Science, Engineering +13

On the relation between deposition conditions and (mechanical) stress in plasma silicon nitride layers

W. A. P. Claassen, W.G.J.M. Valkenburg, W. M. van de Wijgert et al. · Thin Solid Films · 1985 · 45 citations

Materials Science, Engineering, Mechanical Engineering +10