On the relation between deposition conditions and (mechanical) stress in plasma silicon nitride layers - Concepedia

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On the relation between deposition conditions and (mechanical) stress in plasma silicon nitride layers

45

Citations

10

References

1985

Year

W. A. P. Claassen, W.G.J.M. Valkenburg, W. M. van de Wijgert, M. F. C. Willemsen

Thin Solid Films

Materials ScienceEngineeringMechanical EngineeringApplied PhysicsSurface SciencePlasma SiliconSemiconductor Device FabricationDeposition ConditionsSilicon On InsulatorPlasma ProcessingPlasma EtchingChemical Vapor DepositionMicrostructure

References

	Year	Citations

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