Statistics
Publications
8
Citations
159
H-Index
8
Active since
2006
Affiliations
SK Group (South Korea)(Current)
Chang-Moon Lim is an author at SK Group (South Korea) specializing in engineering, applied physics, and microelectronics.
Publications per year
2006–2015
8
8
Positive and negative tone double patterning lithography for 50nm flash memory
Chang-Moon Lim, Seo-Min Kim, Young-Sun Hwang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 54 citations
Optical Materials, Engineering, Electron-beam Lithography +16
EUV stochastic noise analysis and LCDU mitigation by etching on dense contact-hole array patterns
Seo Min Kim, Sunyoung Koo, Jun-Taek Park et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations
Electrical Engineering, Engineering, Electron-beam Lithography +15
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