Sunyoung Koo

Determination of hypoxic region by hypoxia marker in developing mouse embryos in vivo: A possible signal for vessel development

You Mie Lee, Chul‐Ho Jeong, Sunyoung Koo et al. · Developmental Dynamics · 2001 · 292 citations · Full text

Issues and challenges of double patterning lithography in DRAM

Seo-Min Kim, Sunyoung Koo, Jaeseung Choi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 30 citations

Physical Design (Electronics), Engineering, Beam Lithography +12

EUV stochastic noise analysis and LCDU mitigation by etching on dense contact-hole array patterns

Seo Min Kim, Sunyoung Koo, Jun-Taek Park et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Electrical Engineering, Engineering, Electron-beam Lithography +15

Comparison study for 3x-nm contact hole CD uniformity between EUV lithography and ArF immersion double patterning

Keundo Ban, Junggun Heo, Hyunkyung Shim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 12 citations

Engineering, Electron-beam Lithography, Euv Lithography +19

EUV mask particle adders during scanner exposure

Yoonsuk Hyun, Jin‐Soo Kim, Kyuyoung Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 11 citations