Statistics
Publications
2
Citations
84
H-Index
2
Active since
2006
Seo-Min Kim is an author specializing in applied physics, engineering, and microfabrication.
Publications per year
2006–2007
2
2
Positive and negative tone double patterning lithography for 50nm flash memory
Chang-Moon Lim, Seo-Min Kim, Young-Sun Hwang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 54 citations
Optical Materials, Engineering, Electron-beam Lithography +16
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