Young-Sun Hwang

Positive and negative tone double patterning lithography for 50nm flash memory

Chang-Moon Lim, Seo-Min Kim, Young-Sun Hwang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 54 citations

Optical Materials, Engineering, Electron-beam Lithography +16

Issues and challenges of double patterning lithography in DRAM

Seo-Min Kim, Sunyoung Koo, Jaeseung Choi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 30 citations

Physical Design (Electronics), Engineering, Beam Lithography +12

Improving full-wafer on-product overlay using computationally designed process-robust and device-like metrology targets

Youngsik Kim, Young-Sun Hwang, Mi-Rim Jung et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 18 citations

Device-like Metrology Targets, Engineering, Vlsi Design +21