Concepedia

Hyunkyung Shim

HS

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Publications

1

Citations

12

H-Index

1

Active since

2012

Hyunkyung Shim is an author specializing in electronic packaging, applied physics, and materials engineering.

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Publications per year

2012–2012

1

Publications

1

Comparison study for 3x-nm contact hole CD uniformity between EUV lithography and ArF immersion double patterning

Keundo Ban, Junggun Heo, Hyunkyung Shim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 12 citations

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