Statistics
Publications
1
Citations
19
H-Index
1
Active since
2014
Affiliations
SK Group (South Korea)(Current)
Seo Min Kim is an author at SK Group (South Korea) specializing in computer engineering, microfabrication, and electronic packaging.
Publications per year
2014–2014
1
1
EUV stochastic noise analysis and LCDU mitigation by etching on dense contact-hole array patterns
Seo Min Kim, Sunyoung Koo, Jun-Taek Park et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations
Electrical Engineering, Engineering, Electron-beam Lithography +15
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