Keh-Jeng Chang

Use of short-loop electrical measurements for yield improvement

Crid Yu, T. Maung, Costas J. Spanos et al. · IEEE Transactions on Semiconductor Manufacturing · 1995 · 50 citations

Engineering, Measurement, Industrial Engineering +20

Using a statistical metrology framework to identify systematic and random sources of die- and wafer-level ILD thickness variation in CMP processes

E. Chang, B.E. Stine, T. Maung et al. · 2002 · 46 citations

Engineering, Vlsi Design, Measurement +21

2001 needs for multi-level interconnect technology

Soo‐Young Oh, Keh-Jeng Chang · IEEE Circuits and Devices Magazine · 1995 · 28 citations

Engineering, Vlsi Design, Computer Architecture +18

Parameterized SPICE subcircuits for multilevel interconnect modeling and simulation

Keh-Jeng Chang, Noel Chang, Soo‐Young Oh et al. · IEEE Transactions on Circuits and Systems II Analog and Digital Signal Processing · 1992 · 23 citations

Engineering, System-level Design, Simulation +17

Modeling Sub-90nm On-Chip Variation Using Monte Carlo Method for DFM

Jun-Fu Huang, Victor C. Y. Chang, Sally Liu et al. · 2007 · 20 citations

Random On-chip Variation, Engineering, Vlsi Design +16