Concepedia
Statistics
Publications
5
Citations
113
H-Index
Active since
2003
Affiliations
ASML (Netherlands)(Current)
Carl Zeiss (Germany)
Rene Carpaij is an author at ASML (Netherlands) specializing in engineering, physics, and optoelectronics.
Publications per year
2003–2023
Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
Kafai Lai, Alan E. Rosenbluth, Saeed Bagheri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 47 citations
Engineering, Computer Engineering, Electrical Engineering +13
Optimizing and enhancing optical systems to meet the low k 1 challenge
Donis G. Flagello, Robert Socha, Xuelong Shi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 22 citations
Engineering, Physics, Biomedical Optics +15
Overview of stitching for high NA: imaging and overlay experimental and simulation results
Natalia Davydova, Lieve Van Look, Vincent Wiaux et al. · 2023 · 17 citations
Engineering, Computer Engineering, Manufacturing Engineering +6
Fundamental understanding and experimental verification of bright versus dark field imaging
Natalia Davydova, Jo Finders, John McNamara et al. · 2020 · 14 citations
Engineering, Materials Engineering, Digital Imaging +9
Supershear bursts in the propagation of a tensile crack in linear elastic material
Fabian Barras, Rene Carpaij, Philippe H. Geubelle et al. · Physical review. E · 2018 · 13 citations · Full text
Natural Sciences, Materials Science, Physics +17
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