M. Viitanen

Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

Riikka L. Puurunen, Wilfried Vandervorst, W.F.A. Besling et al. · Journal of Applied Physics · 2004 · 155 citations

Zirconium Oxide, Engineering, Chemical Deposition +16

Atomic layer deposition of hafnium oxide on germanium substrates

Annelies Delabie, Riikka L. Puurunen, Bert Brijs et al. · Journal of Applied Physics · 2005 · 101 citations

Engineering, Hfo2 Layers, Closed Hfo2 Layer +17

Silica poisoning of oxygen membranes

M. Viitanen · Solid State Ionics · 2002 · 75 citations

Silica Poisoning, Chemical Engineering, Poisoning +1

Cu/ZnO and Cu/ZnO/SiO₂Catalysts Studied by Low-Energy Ion Scattering

M. Viitanen, W. Jansen, R. G. van Welzenis et al. · The Journal of Physical Chemistry B · 1999 · 52 citations

Growth of Aluminum Nitride on Porous Alumina and Silica through Separate Saturated Gas−Solid Reactions of Trimethylaluminum and Ammonia

Riikka L. Puurunen, Andrew Root, P. Sarv et al. · Chemistry of Materials · 2002 · 44 citations

Aluminium Nitride, Engineering, Nanoporous Material +17