B. Ebersberger

Conducting atomic force microscopy for nanoscale electrical characterization of thin SiO2

Alexander Olbrich, B. Ebersberger, Christian Boit · Applied Physics Letters · 1998 · 167 citations

Atomic Force Microscopy, Engineering, Afm Tip +21

Electrical characterization of stressed and broken down SiO2 films at a nanometer scale using a conductive atomic force microscope

M. Porti, M. Nafrı́a, X. Aymerich et al. · Journal of Applied Physics · 2002 · 112 citations

Engineering, Silicon On Insulator, Sio2 Films +25

Cu pillar bumps as a lead-free drop-in replacement for solder-bumped, flip-chip interconnects

B. Ebersberger, Charles Lee · 2008 · 51 citations

Engineering, Flip Chip Package, Cu Pillar Bumps +19

High aspect ratio all diamond tips formed by focused ion beam for conducting atomic force microscopy

Alexander Olbrich, B. Ebersberger, Christian Boit et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 50 citations

Electrical Probes, Engineering, Microscopy +21

Nanometer-scale electrical characterization of stressed ultrathin SiO2 films using conducting atomic force microscopy

M. Porti, M. Nafrı́a, X. Aymerich et al. · Applied Physics Letters · 2001 · 48 citations · Full text

Atomic Force Microscopy, Engineering, Thin Film Process Technology +21