Darryl W. Peters

Silicon coatings on copper by chemical vapor deposition in fluidized bed reactors

Angel Sanjurjo, Bernard J. Wood, K. H. Lau et al. · Surface and Coatings Technology · 1991 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

Temperature dependence of the peak power of a Hänsch-type dye laser

Darryl W. Peters, C. W. Mathews · Applied Optics · 1980 · 13 citations

Natural Sciences, Physics, Optics +10

Fabrication and testing of 0.1-μm-linewidth microgap x-ray masks

Mark L. Schattenburg, K. Early, Y. Ku et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 13 citations

Engineering, Materials Engineering, Materials Science +16

Incorporation of Cu Passivators in Post-CMP Cleaners

Darryl W. Peters · ECS Transactions · 2007 · 12 citations

Natural Sciences, Chemistry, Materials Science +17

Cu Post-CMP Displacement Cleaning: A Mechanistic Product Development Approach Based on Selected Thermodynamic and Kinetic Data

Darryl W. Peters · MRS Proceedings · 2007 · 11 citations

Engineering, Materials Engineering, Materials Science +15