Silicon coatings on copper by chemical vapor deposition in fluidized bed reactors

Angel Sanjurjo, Bernard J. Wood, K. H. Lau, G.T. Tong, D.K. Choi, Michael C. H. McKubre, Herking Song, Darryl W. Peters, Nicole L. Church

Surface and Coatings Technology · 1991 · 23 citations · 5 references

Concepts

References

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