Chris Clifford

Statistics

Publications

Citations

132

H-Index

Active since

2007

Affiliations

University of California, Berkeley(Current)

Luminex (United States)

Chris Clifford is an author at University of California, Berkeley specializing in defect modeling, extreme ultraviolet lithography, and materials science.

ORCID

Publications per year

2007–2013

Publications

Simulation and compensation methods for EUV lithography masks with buried defects

Chris Clifford · eScholarship (California Digital Library) · 2010 · 25 citations · Full text

Natural Sciences, Electrical Engineering, Materials Science +16

Fast simulation methods and modeling for extreme ultraviolet masks with buried defects

Chris Clifford · Journal of Micro/Nanolithography MEMS and MOEMS · 2009 · 23 citations

Computing, Manufacturing Engineering, Materials Science +17

Accurate 3DEMF mask model for full-chip simulation

Michael Lam, Kostas Adam, David S. Fryer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 19 citations

Engineering, Computational Engineering, Computer Engineering +11

Compensation methods for buried defects in extreme ultraviolet lithography masks

Chris Clifford, Tina T. Chan, Andrew R. Neureuther · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 18 citations

Engineering, Materials Engineering, Materials Science +16

Smoothing based fast model for images of isolated buried EUV multilayer defects

Chris Clifford, Andrew R. Neureuther · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 13 citations

Engineering, Materials Engineering, Digital Imaging +14

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