Tina T. Chan

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Active since

2010

Affiliations

University of California, Berkeley(Current)

Tina T. Chan is an author at University of California, Berkeley specializing in extreme ultraviolet lithography, thin film lithography, and materials science.

Publications per year

2010–2011

Publications

Compensation methods for buried defects in extreme ultraviolet lithography masks

Chris Clifford, Tina T. Chan, Andrew R. Neureuther · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 18 citations

Engineering, Materials Engineering, Materials Science +16

Compensation methods using a new model for buried defects in extreme ultraviolet lithography masks

Chris Clifford, Tina T. Chan, Andrew R. Neureuther et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Natural Sciences, Manufacturing Engineering, Materials Science +17

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