Statistics
Publications
3
Citations
53
H-Index
3
Active since
1988
Affiliations
University of Arizona(Current)
Mithkal M. Smadi is an author at University of Arizona specializing in semiconductor devices, materials science, and surface science.
Publications per year
1988–1992
3
3
Particle contamination on a silicon substrate in a SF6/Ar plasma
Mithkal M. Smadi, George Kong, Robert N. Carlile et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 21 citations
Natural Sciences, Materials Engineering, Materials Science +16
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