Concepedia

Takeshi Miyachi

TM

2

Publications

36

Citations

2

H-Index

1996

Active since

Affiliations

Canon (Japan)(Current)

Takeshi Miyachi is an author at Canon (Japan) specializing in applied physics, engineering, and microstructure.

Top concepts

EngineeringApplied PhysicsX-ray ImagingMicrostructureInstrumentationOptoelectronicsMaterial ScienceMicroelectronicsMicrofabricationOptical Properties

Publications per year

1996–2003

2

Publications

2

Fabrication of x-ray masks for giga-bit DRAM by using a SiC membrane and W–Ti absorber

Kenji Marumoto, Hideki Yabe, Sunao Aya et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 20 citations

Engineering, Electron-beam Lithography, X-ray Masks +17

LPP-based reflectometer for characterization of EUV lithography systems

Akira Miyake, Takeshi Miyachi, Mitsuaki Amemiya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 16 citations

Beam Intensity Instability, Engineering, Beam Lithography +11

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