Concepedia

Mitsuaki Amemiya

MA

3

Publications

39

Citations

3

H-Index

2003

Active since

Affiliations

Canon (Japan)(Current)

Mitsuaki Amemiya is an author at Canon (Japan) specializing in applied physics, engineering, and instrumentation.

Top concepts

EngineeringApplied PhysicsInstrumentationOptoelectronicsOptical PropertiesGraded-reflectivity MirrorsMicroscopyReflectionReflectanceMaterial Science

Publications per year

2003–2008

3

Publications

3

LPP-based reflectometer for characterization of EUV lithography systems

Akira Miyake, Takeshi Miyachi, Mitsuaki Amemiya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 16 citations

Beam Intensity Instability, Engineering, Beam Lithography +11

Particle-free mask handling techniques and a dual-pod carrier

Mitsuaki Amemiya, Kazuya Ota, Takao Taguchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 13 citations

Advanced Packaging, Electrical Engineering, Engineering +14

Phase measurement of reflection of EUV multilayer mirror using EUV standing waves

Akira Miyake, Mitsuaki Amemiya, Fumitaro Masaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 10 citations

Engineering, Electron-beam Lithography, Microscopy +16

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