R. Vallat

A bifunctional luminescent single-ion magnet: towards correlation between luminescence studies and magnetic slow relaxation processes

Jérôme Long, R. Vallat, Rute A. S. Ferreira et al. · Chemical Communications · 2012 · 179 citations

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

R. Vallat, R. Gassilloud, Brice Eychenne et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 62 citations · Full text

Engineering, Selective Deposition, Chemical Deposition +18

Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition

C. Vallée, M. Bonvalot, S. Belahcen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 56 citations · Full text

Engineering, Chemistry, Chemical Deposition +16

Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme

R. Vallat, R. Gassilloud, O. Salicio et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 36 citations · Full text

Integration Scheme, Engineering, Peald Process +23

Topographically selective deposition

A. Chaker, C. Vallée, V. Pesce et al. · Applied Physics Letters · 2019 · 15 citations · Full text

Materials Science, Peald Reactor, Electrical Engineering +14