S. Belahcen

Publications

Citations

H-Index

2019

Active since

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

CEA Grenoble

Laboratoire d'Électronique des Technologies de l'Information

Institut polytechnique de Grenoble

Université Grenoble Alpes

S. Belahcen is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in applied physics, materials science, and engineering.

ORCID

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceElectrical EngineeringThin FilmsNanotechnologyMicroelectronicsMaterials EngineeringChemistry

Publications per year

2019–2020

Publications

Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition

C. Vallée, M. Bonvalot, S. Belahcen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 56 citations · Full text

Engineering, Chemistry, Chemical Deposition +16

Topographically selective deposition

A. Chaker, C. Vallée, V. Pesce et al. · Applied Physics Letters · 2019 · 15 citations · Full text

Materials Science, Peald Reactor, Electrical Engineering +14

TiN/Gd:HfO2/TiN capacitors grown by PEALD showing high endurance ferroelectric switching

S. Belahcen, T. François, L. Grenouillet et al. · Applied Physics Letters · 2020 · 15 citations · Full text

Crystal Structure, Engineering, Hybrid Capacitor +16

Impact of roughness of TiN bottom electrode on the forming voltage of HfO2 based resistive memories

C. Charpin-Nicolle, M. Bonvalot, Romain Sommer et al. · Microelectronic Engineering · 2019 · 12 citations · Full text

Materials Engineering, Materials Science, Electrical Engineering +11

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