A. Chaker

Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition

C. Vallée, M. Bonvalot, S. Belahcen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 56 citations · Full text

Engineering, Chemistry, Chemical Deposition +16

Evolution of Crystal Structure During the Initial Stages of ZnO Atomic Layer Deposition

Raphaël Boichot, Liang Tian, Marie‐Ingrid Richard et al. · Chemistry of Materials · 2016 · 33 citations · Full text

Crystal Structure, Engineering, Crystal Growth Technology +16

Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source

A. Chaker, P. D. Szkutnik, J. Pointet et al. · Journal of Applied Physics · 2016 · 32 citations

Oxygen Source, Interfacial Reactions, Engineering +20

Nanoscale Patterning of Zinc Oxide from Zinc Acetate Using Electron Beam Lithography for the Preparation of Hard Lithographic Masks

A. Chaker, Hayden R. Alty, Peng Tian et al. · ACS Applied Nano Materials · 2020 · 26 citations

Engineering, Electron-beam Lithography, Zinc Oxide +20

Topographically selective deposition

A. Chaker, C. Vallée, V. Pesce et al. · Applied Physics Letters · 2019 · 15 citations · Full text

Materials Science, Peald Reactor, Electrical Engineering +14