Concepedia

Hayden R. Alty

HR

4

Publications

154

Citations

4

H-Index

2017

Active since

Affiliations

California Institute of Technology(Current)

University of Manchester

Kavli Energy NanoScience Institute

Hayden R. Alty is an author at California Institute of Technology specializing in applied physics, engineering, and materials science.

Top concepts

Publications per year

2017–2022

4

Publications

4

Plasma-Etched Pattern Transfer of Sub-10 nm Structures Using a Metal–Organic Resist and Helium Ion Beam Lithography

Scott Lewis, Matthew S. Hunt, Guy A. DeRose et al. · Nano Letters · 2019 · 67 citations · Full text

Tuning the Performance of Negative Tone Electron Beam Resists for the Next Generation Lithography

Scott Lewis, Guy A. DeRose, Hayden R. Alty et al. · Advanced Functional Materials · 2022 · 36 citations · Full text

, , +17

Nanoscale Patterning of Zinc Oxide from Zinc Acetate Using Electron Beam Lithography for the Preparation of Hard Lithographic Masks

A. Chaker, Hayden R. Alty, Peng Tian et al. · ACS Applied Nano Materials · 2020 · 26 citations

, , +20

Use of Supramolecular Assemblies as Lithographic Resists

Scott Lewis, Antonio Fernández, Guy A. DeRose et al. · Angewandte Chemie International Edition · 2017 · 25 citations · Full text

, , +14

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