P. I. Rovira

Assessment of effective-medium theories in the analysis of nucleation and microscopic surface roughness evolution for semiconductor thin films

Hiroyuki Fujiwara, Joohyun Koh, P. I. Rovira et al. · Physical review. B, Condensed matter · 2000 · 275 citations

Materials Science, Semiconductor Thin Films, Surface Characterization +15

Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth

Joungchel Lee, P. I. Rovira, Ilsin An et al. · Review of Scientific Instruments · 1998 · 206 citations · Full text

Diamond Film, Optical Materials, Engineering +21

Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane

Joohyun Koh, André S. Ferlauto, P. I. Rovira et al. · Applied Physics Letters · 1999 · 152 citations

Phase Diagrams, Engineering, Thin Film Process Technology +18

Analysis of specular and textured SnO2:F films by high speed four-parameter Stokes vector spectroscopy

P. I. Rovira, R. W. Collins · Journal of Applied Physics · 1999 · 92 citations

Optical Materials, Engineering, Optical Testing +27

Advances in multichannel spectroscopic ellipsometry

R. W. Collins, Ilsin An, Hiroyuki Fujiwara et al. · Thin Solid Films · 1998 · 82 citations

Physics, Optical Properties, Spectroscopy +5